SF6 is applied in the above process as an etching gas. Due to the density and large molecule size, SF6 is a preferred etching gas in flat panel and MEMS production processes. Fluorinated gases, such as Sulfur Hexafluoride (SF6), play very important roles in the manufacturing of silicon devices.
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Get PriceEnervac sf6 handling re use in Benin. Sulfur Hexafluoride (SF6) is an excellent gaseous dielectric for high voltage power applications. It has been used extensively in high voltage circuit breakers and other switchgear employed by the power industry.
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