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Get PriceSF6 is applied in the above process as an etching gas. Due to the density and large molecule size, SF6 is a preferred etching gas in flat panel and MEMS production processes. Fluorinated gases, such as Sulfur Hexafluoride (SF6), play very important roles in the manufacturing of silicon devices.
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Get PriceAlthough sulfur hexafluoride is nontoxic and nonflammable, escaped gas in enclosed rooms displaces oxygen in the air and could lead to asphyxiation. SF 6 is also a potent greenhouse gas – 23,900 times more effective than carbon dioxide at trapping infrared radiation in the atmosphere. In addition, TD plant safety depends on the purity of SF 6 gas. Under normal conditions during an electrical discharge, the six fluorine atoms split from the sulfur atom to capture electrons; after quenching
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Get PriceSulfur Hexafluoride (SF6) is more and more used for the manufacturing of semiconductor devices such as IC (integrated circuits), flat panels, photovoltaic panels and MEMS (Micro Electro Mechanical Systems). SF6 is applied in the above process as an etching gas.
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